Si(113)•\–Ê‚Ì�\‘¢‘Š“]ˆÚ �‚—U“d—¦�â‰�–Œ (HfO2) ‚ÌŒ‹�»‰»‰ß’ö ‹à‘®”¼“±‘ÌŠE–ʂ̔÷�¬ŠiŽq˜c‚Ý SiC •\–Ê�\‘¢‚ÆŽ_‰»‰ß’ö Œ´ŽqƒŒƒxƒ‹‚ł̖€ŽC‚̃�ƒJƒjƒYƒ€ GaN”––Œ‚ÌZnOŠî”Â�ã‚Ì�‰Šú�¬’·�§Œä